In this work, WO3 thin films were fabricated by reactive DC magnetron sputtering, and then thermally annealed at 400°C for 2 h under air, low vacuum and high vacuum. After the annealing treatments, the morphology and crystallinity of the WO3 thin films were observed using FE-SEM, GI-XRD and Raman spectroscopy. The optical properties were analyzed by UV-Vis spectroscopy. The results showed the decrease of film thickness under different annealing conditions. In addition, the annealing conditions also affected the crystalline structure at diffraction planes (200) and (002). The transmittance of the WO3 thin films revealed that the annealing treatment at high vacuum led to lower transparency. Furthermore, the WO3 thin film annealed under air produced the highest PEC efficiency. Therefore, this approach offers an alternative strategy for photoelectrochemical (PEC) water splitting application.
Keywords: WO3 thin film; DC magnetron sputtering; photoelectrochemical water splitting
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Author Information
Tienthong Yuangkaew
Department of Electrical Engineering, Faculty of Engineer, Rajamangala University of Technology Isan, Khon Kaen Campus, Khon Kaen, Thailand
Chatchai Ponchio
Department of Chemistry, Faculty of Science and Technology, Rajamangala University of Technology Thanyaburi, Pathum Thani, Thailand
Peerapong Nuchuay
Program of Industrial Electrical Technology, Faculty of Science and Technology, Suratthani Rajabhat University, Surat Thani, Thailand
Viyapol Patthanasettakul
National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, Thailand
Pitak Eiamchai
National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, Thailand
Noppadon Nuntawong
National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, Thailand
Mati Horprathum
National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, Thailand
Saksorn Limwichean*
National Electronics and Computer Technology Center (NECTEC), National Science and Technology Development Agency, Pathum Thani, Thailand
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