The Effect of Annealing Treatment on WO3 Thin Film Prepared by Reactive DC Magnetron Sputtering for Photo-electrochemical Water Splitting Application

Abstract

In this work, WO₃ thin films were fabricated by reactive DC magnetron sputtering, and then thermally annealed at 400°C for 2 h under air, low vacuum and high vacuum. After the annealing treatments, the morphology and crystallinity of the WO₃ thin films were observed using FE-SEM, GI-XRD and Raman spectroscopy. The optical properties were analyzed by UV-Vis spectroscopy. The results showed the decrease of film thickness under different annealing conditions. In addition, the annealing conditions also affected the crystalline structure at diffraction planes (200) and (002). The transmittance of the WO₃ thin films revealed that the annealing treatment at high vacuum led to lower transparency. Furthermore, the WO₃ thin film annealed under air produced the highest PEC efficiency. Therefore, this approach offers an alternative strategy for photoelectrochemical (PEC) water splitting application.

Keywords: WO₃ thin film; DC magnetron sputtering; photoelectrochemical water splitting

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E-mail: saksorn.limwichean@nectec.or.th

How to Cite

Citation Format

Yuangkaew, T. ., Ponchio, C. ., Nuchuay, P. ., Patthanasettakul, V. ., Eiamchai, P. ., Nuntawong, N. ., Horprathum, M. ., & Limwichean*, S. . (2023). The Effect of Annealing Treatment on WO3 Thin Film Prepared by Reactive DC Magnetron Sputtering for Photo-electrochemical Water Splitting Application. CURRENT APPLIED SCIENCE AND TECHNOLOGY, DOI: 10.55003/cast.2023.06.23.010 (10 pages). https://doi.org/10.55003/cast.2023.06.23.010

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Author Information

Tienthong Yuangkaew

Department of Electrical Engineering, Faculty of Engineer, Rajamangala University of Technology Isan, Khon Kaen Campus, Khon Kaen, Thailand

Chatchai Ponchio

Department of Chemistry, Faculty of Science and Technology, Rajamangala University of Technology Thanyaburi, Pathum Thani, Thailand

Peerapong Nuchuay

Program of Industrial Electrical Technology, Faculty of Science and Technology, Suratthani Rajabhat University, Surat Thani, Thailand